Statistics of soft and hard breakdown in thin SiO::2:: gate oxides

Jordi Suñé, Ernest Y. Wu, D. Jiménez, Wing L. Lai. Statistics of soft and hard breakdown in thin SiO::2:: gate oxides. Microelectronics Reliability, 43(8):1185-1192, 2003. [doi]

Authors

Jordi Suñé

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Ernest Y. Wu

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D. Jiménez

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Wing L. Lai

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