Low-noise CMOS integrated sensing electronics for capacitive MEMS strain sensors

Michael A. Suster, Jun Guo, Nattapon Chaimanonart, Wen H. Ko, Darrin J. Young. Low-noise CMOS integrated sensing electronics for capacitive MEMS strain sensors. In Proceedings of the IEEE 2004 Custom Integrated Circuits Conference, CICC 2004, Orlando, FL, USA, October 2004. pages 693-696, IEEE, 2004. [doi]

Abstract

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