Impact of Anode-side Defect Generation on Inter-Level TDDB Degradation in Cu/Low-k Damascene Structures - researchr publication authors

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Naohito Suzumura, K. Omori, Hideaki Tsuchiya, Hideki Aono, T. Yamashita. Impact of Anode-side Defect Generation on Inter-Level TDDB Degradation in Cu/Low-k Damascene Structures. In 2020 IEEE International Reliability Physics Symposium, IRPS 2020, Dallas, TX, USA, April 28 - May 30, 2020. pages 1-6, IEEE, 2020. [doi]

This author has not been identified. Look up 'Naohito Suzumura' in GoogleThis author has not been identified. Look up 'K. Omori' in GoogleThis author has not been identified. Look up 'Hideaki Tsuchiya' in GoogleThis author has not been identified. Look up 'Hideki Aono' in GoogleThis author has not been identified. It may be one of the following persons:

Takayoshi Yamashita

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