Kazuhiro Takahashi, Ho Nam Kwon, Kunihiko Saruta, Makoto Mita, Hiroyuki Fujita, Hiroshi Toshiyoshi. A two-dimensional ƒ-θ micro optical lens scanner with electrostatic comb-drive XY-stage. IEICE Electronic Express, 2(21):542-547, 2005. [doi]
Abstract is missing.