Kazuhiro Takahashi, Makoto Mita, Hiroyuki Fujita, Kazuhiro Suzuki, Hideyuki Funaki, Kazuhiko Itaya, Hiroshi Toshiyoshi. A study on process-compatibility in CMOS-first MEMS-last integration. In Proceedings of the IEEE 2008 Custom Integrated Circuits Conference, CICC 2008, DoubleTree Hotel, San Jose, California, USA, September 21-24, 2008. pages 85-88, IEEE, 2008. [doi]
@inproceedings{TakahashiMFSFIT08,
title = {A study on process-compatibility in CMOS-first MEMS-last integration},
author = {Kazuhiro Takahashi and Makoto Mita and Hiroyuki Fujita and Kazuhiro Suzuki and Hideyuki Funaki and Kazuhiko Itaya and Hiroshi Toshiyoshi},
year = {2008},
doi = {10.1109/CICC.2008.4672026},
url = {http://dx.doi.org/10.1109/CICC.2008.4672026},
researchr = {https://researchr.org/publication/TakahashiMFSFIT08},
cites = {0},
citedby = {0},
pages = {85-88},
booktitle = {Proceedings of the IEEE 2008 Custom Integrated Circuits Conference, CICC 2008, DoubleTree Hotel, San Jose, California, USA, September 21-24, 2008},
publisher = {IEEE},
isbn = {978-1-4244-2018-6},
}