Kazuhiro Takahashi, Makoto Mita, Hiroyuki Fujita, Kazuhiro Suzuki, Hideyuki Funaki, Kazuhiko Itaya, Hiroshi Toshiyoshi. A study on process-compatibility in CMOS-first MEMS-last integration. In Proceedings of the IEEE 2008 Custom Integrated Circuits Conference, CICC 2008, DoubleTree Hotel, San Jose, California, USA, September 21-24, 2008. pages 85-88, IEEE, 2008. [doi]
Abstract is missing.