Hikaru Takamatsu, Toshihiko Sugiura. Nonlinear Vibration of Electrostatic MEMS under DC and AC Applied Voltage. In 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada. pages 423-424, IEEE Computer Society, 2005. [doi]
@inproceedings{TakamatsuS05,
title = {Nonlinear Vibration of Electrostatic MEMS under DC and AC Applied Voltage},
author = {Hikaru Takamatsu and Toshihiko Sugiura},
year = {2005},
doi = {10.1109/ICMENS.2005.89},
url = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.89},
researchr = {https://researchr.org/publication/TakamatsuS05},
cites = {0},
citedby = {0},
pages = {423-424},
booktitle = {2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada},
publisher = {IEEE Computer Society},
isbn = {0-7695-2398-6},
}