Nonlinear Vibration of Electrostatic MEMS under DC and AC Applied Voltage

Hikaru Takamatsu, Toshihiko Sugiura. Nonlinear Vibration of Electrostatic MEMS under DC and AC Applied Voltage. In 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada. pages 423-424, IEEE Computer Society, 2005. [doi]

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