Hikaru Takamatsu, Toshihiko Sugiura. Nonlinear Vibration of Electrostatic MEMS under DC and AC Applied Voltage. In 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada. pages 423-424, IEEE Computer Society, 2005. [doi]
Abstract is missing.