Hidekuni Takao, Masaki Yawata, Ryo Kodama, Kazuaki Sawada, Makoto Ishida. Multi-functional Monolithic-MEMS Tactile Imager Using Flexible Deformation of Silicon IC. In Proceedings of the IEEE 2007 Custom Integrated Circuits Conference, CICC 2007, DoubleTree Hotel, San Jose, California, USA, September 16-19, 2007. pages 131-134, IEEE, 2007. [doi]
Abstract is missing.