A 0.18-µm CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers

Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu. A 0.18-µm CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers. IEICE Electronic Express, 15(2):20171227, 2018. [doi]

Abstract

Abstract is missing.