Development of sputtering conditions for PZT micro actuator with high piezoelectric property by Au-Pt buffer layer - researchr publication related

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Rikiya Takita, Kazuyoshi Tsuchiya, Yasutomo Uetsuji. Development of sputtering conditions for PZT micro actuator with high piezoelectric property by Au-Pt buffer layer. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2011, Nagoya, Japan, November 6-9, 2011. pages 285-290, IEEE, 2011. [doi]

The following publications are possibly variants of this publication:

Research on the surface in Au-Pt buffer layer for the high piezoelectric PZTRikiya Takita, Kazuyoshi Tsuchiya, Yasutomo Uetsuji. mhs 2012: 201-206 [doi]

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