2 Nb/AlOx/Nb Planarization Process

Masamitsu Tanaka, Yoshihiro Kitagawa, Tetsuro Satoh, Tsuyoshi Yamamoto. 2 Nb/AlOx/Nb Planarization Process. In International Conference on IC Design and Technology, ICICDT 2023, Tokyo, Japan, September 25-28, 2023. pages 84-87, IEEE, 2023. [doi]

Abstract

Abstract is missing.