A novel method of anodic bonding

Wei Tang, Zhe Chen, Haixia Zhang. A novel method of anodic bonding. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 739-742, IEEE, 2009. [doi]

Abstract

Abstract is missing.