Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors

Bolun Tang, Yunbo Shi, Jianwei Li, Jie Tang, Qiaohua Feng. Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors. Sensors, 22(18):6778, 2022. [doi]

Authors

Bolun Tang

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Yunbo Shi

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Jianwei Li

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Jie Tang

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Qiaohua Feng

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