Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors

Bolun Tang, Yunbo Shi, Jianwei Li, Jie Tang, Qiaohua Feng. Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors. Sensors, 22(18):6778, 2022. [doi]

Abstract

Abstract is missing.