Bolun Tang, Yunbo Shi, Jianwei Li, Jie Tang, Qiaohua Feng. Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors. Sensors, 22(18):6778, 2022. [doi]
@article{TangSLTF22,
title = {Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors},
author = {Bolun Tang and Yunbo Shi and Jianwei Li and Jie Tang and Qiaohua Feng},
year = {2022},
doi = {10.3390/s22186778},
url = {https://doi.org/10.3390/s22186778},
researchr = {https://researchr.org/publication/TangSLTF22},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {22},
number = {18},
pages = {6778},
}