Wei Min Tao, Ming-Jun Zhang, Michael Liu, Xiao Ping Yun. Residual Vibration Analysis and Suppression for SCARA Robot Arm in Semiconductor Manufacturing. In 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2006, October 9-15, 2006, Beijing, China. pages 5153-5158, IEEE, 2006. [doi]
Abstract is missing.