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Arthur Tay, Weng Khuen Ho, Xiaodong Wu. Real-Time Control of Photoresist Extinction Coefficient Uniformity in the Microlithography Process. IEEE Trans. Contr. Sys. Techn., 15(1):99-105, 2007. [doi]
Possibly Related PublicationsThe following publications are possibly variants of this publication: Real-time estimation and control of photoresist properties in microlithographyXiaodong Wu, Arthur Tay, Weng Khuen Ho, Kok Kiong Tan. IEEEcca 2007: 694-699 [doi]
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