A review of scanning methods and control implications for scanning probe microscopy

Yik Ren Teo, Yuen Kuan Yong, Andrew J. Fleming. A review of scanning methods and control implications for scanning probe microscopy. In 2016 American Control Conference, ACC 2016, Boston, MA, USA, July 6-8, 2016. pages 7377-7383, IEEE, 2016. [doi]

Abstract

Abstract is missing.