A Study of the Variability and Design Considerations of Ferroelectric VNAND Memories With Polycrystalline Films Using An Experimentally Validated TCAD Model

M. Thesberg, Franz Schanovsky, Zlatan Stanojevic, Oskar Baumgartner, Markus Karner. A Study of the Variability and Design Considerations of Ferroelectric VNAND Memories With Polycrystalline Films Using An Experimentally Validated TCAD Model. In 53rd IEEE European Solid-State Device Research Conference, ESSDERC 2023, Lisbon, Portugal, September 11-14, 2023. pages 77-80, IEEE, 2023. [doi]

Abstract

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