Numerical treatment of nonrectangular field-oxide for 3-D MOSFET simulation

Martin Thurner, Philipp Lindorfer, Siegfried Selberherr. Numerical treatment of nonrectangular field-oxide for 3-D MOSFET simulation. IEEE Trans. on CAD of Integrated Circuits and Systems, 9(11):1189-1197, 1990. [doi]

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