Bian Tian, Yulong Zhao, Zhuangde Jiang, Ling Zhang, Nansheng Liao, Yuanhao Liu, Chao Meng. The analysis and structural design of micro SOI pressure sensors. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 55-58, IEEE, 2009. [doi]
Abstract is missing.