Davide Tierno, Kristof Croes, A. Ajaykumar, S. Ramesh, G. Van den bosch, M. Rosmeulen. Reliability of Mo as Word Line Metal in 3D NAND. In IEEE International Reliability Physics Symposium, IRPS 2021, Monterey, CA, USA, March 21-25, 2021. pages 1-6, IEEE, 2021. [doi]
@inproceedings{TiernoCARBR21,
title = {Reliability of Mo as Word Line Metal in 3D NAND},
author = {Davide Tierno and Kristof Croes and A. Ajaykumar and S. Ramesh and G. Van den bosch and M. Rosmeulen},
year = {2021},
doi = {10.1109/IRPS46558.2021.9405132},
url = {https://doi.org/10.1109/IRPS46558.2021.9405132},
researchr = {https://researchr.org/publication/TiernoCARBR21},
cites = {0},
citedby = {0},
pages = {1-6},
booktitle = {IEEE International Reliability Physics Symposium, IRPS 2021, Monterey, CA, USA, March 21-25, 2021},
publisher = {IEEE},
isbn = {978-1-7281-6893-7},
}