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Reliability of Mo as Word Line Metal in 3D NAND

Davide Tierno, Kristof Croes, A. Ajaykumar, S. Ramesh, G. Van den bosch, M. Rosmeulen. Reliability of Mo as Word Line Metal in 3D NAND. In IEEE International Reliability Physics Symposium, IRPS 2021, Monterey, CA, USA, March 21-25, 2021. pages 1-6, IEEE, 2021. [doi]

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Davide Tierno

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Kristof Croes

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A. Ajaykumar

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S. Ramesh

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G. Van den bosch

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M. Rosmeulen

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