The effectiveness of variability reduction in decreasing wafer fabrication cycle time

Israel Tirkel. The effectiveness of variability reduction in decreasing wafer fabrication cycle time. In Winter Simulations Conference: Simulation Making Decisions in a Complex World, WSC 2013, Washington, DC, USA, December 8-11, 2013. pages 3796-3805, IEEE, 2013. [doi]

Abstract

Abstract is missing.