An Automatic Optical Simulation-Based Lithography Hotspot Fix Flow for Post-Route Optimization

Yang-Shan Tong, Sao-Jie Chen. An Automatic Optical Simulation-Based Lithography Hotspot Fix Flow for Post-Route Optimization. IEEE Trans. on CAD of Integrated Circuits and Systems, 29(5):671-684, 2010. [doi]

Abstract

Abstract is missing.