Device and circuit implications of double-patterning - A designer s perspective

Rasit Onur Topaloglu. Device and circuit implications of double-patterning - A designer s perspective. In Proceedings of the 12th International Symposium on Quality Electronic Design, ISQED 2011, Santa Clara, California, USA, 14-16 March 2011. pages 757-760, IEEE, 2011. [doi]

@inproceedings{Topaloglu11a,
  title = {Device and circuit implications of double-patterning - A designer s perspective},
  author = {Rasit Onur Topaloglu},
  year = {2011},
  doi = {10.1109/ISQED.2011.5770814},
  url = {http://dx.doi.org/10.1109/ISQED.2011.5770814},
  researchr = {https://researchr.org/publication/Topaloglu11a},
  cites = {0},
  citedby = {0},
  pages = {757-760},
  booktitle = {Proceedings of the 12th International Symposium on Quality Electronic Design, ISQED 2011, Santa Clara, California, USA, 14-16 March 2011},
  publisher = {IEEE},
  isbn = {978-1-61284-914-0},
}