Design of an ultra-low pressure sensor based on the growth of graphene on silicon dioxide surface

Quochung Tran, Chengchen Gao, Yilong Hao. Design of an ultra-low pressure sensor based on the growth of graphene on silicon dioxide surface. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 526-529, IEEE, 2017. [doi]

Authors

Quochung Tran

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Chengchen Gao

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Yilong Hao

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