Tan D. Tran, Minh D. Nguyen, Long T. Nguyen, Tue H. Huynh, Thuy P. Nguyen. Novel synthesis design of a 3-DOF silicon piezoresistive micro accelerometer. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 112-115, IEEE, 2009. [doi]
Abstract is missing.