Carlo Trigona, Suhail Ahmed Almani, Alireza Mehdi, Giuliano A. Salerno, Vincenzina Strano, Ausrine Bartasyte, Samuel Margueron, Salvatore Baglio, Quentin Micard. Delving into Conversion Effects in 0.5 µm Thin Film Aluminum Nitride MEMS Devices. In IEEE International Symposium on Robotic and Sensors Environments, ROSE 2024, Chemnitz, Germany, June 20-21, 2024. pages 1-5, IEEE, 2024. [doi]
Abstract is missing.