Min-Chun Tsai. A formula of STI cmp design rule. In Vijay Narayanan, Zhiyuan Yan, Enrico Macii, Sanjukta Bhanja, editors, Proceedings of the 18th ACM Great Lakes Symposium on VLSI 2008, Orlando, Florida, USA, May 4-6, 2008. pages 11-16, ACM, 2008. [doi]
Abstract is missing.