Defect detection in inhomogeneously textured sputtered surfaces using 3D Fourier image reconstruction

Du-Ming Tsai, Chih-Chia Kuo. Defect detection in inhomogeneously textured sputtered surfaces using 3D Fourier image reconstruction. Mach. Vis. Appl., 18(6):383-400, 2007. [doi]

@article{TsaiK07:0,
  title = {Defect detection in inhomogeneously textured sputtered surfaces using 3D Fourier image reconstruction},
  author = {Du-Ming Tsai and Chih-Chia Kuo},
  year = {2007},
  doi = {10.1007/s00138-007-0073-3},
  url = {http://dx.doi.org/10.1007/s00138-007-0073-3},
  researchr = {https://researchr.org/publication/TsaiK07%3A0},
  cites = {0},
  citedby = {0},
  journal = {Mach. Vis. Appl.},
  volume = {18},
  number = {6},
  pages = {383-400},
}