Defect detection in inhomogeneously textured sputtered surfaces using 3D Fourier image reconstruction

Du-Ming Tsai, Chih-Chia Kuo. Defect detection in inhomogeneously textured sputtered surfaces using 3D Fourier image reconstruction. Mach. Vis. Appl., 18(6):383-400, 2007. [doi]

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