Defect detection in inhomogeneously textured sputtered surfaces using 3D Fourier image reconstruction

Du-Ming Tsai, Chih-Chia Kuo. Defect detection in inhomogeneously textured sputtered surfaces using 3D Fourier image reconstruction. Mach. Vis. Appl., 18(6):383-400, 2007. [doi]

Abstract

Abstract is missing.