Chia-Hung Dylan Tsai, Makoto Kaneko. Frequency responses of on-chip pressure sensor with different deformation chambers. In 2015 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015, Nagoya, Japan, November 23-25, 2015. pages 1-3, IEEE, 2015. [doi]
@inproceedings{TsaiK15-1,
title = {Frequency responses of on-chip pressure sensor with different deformation chambers},
author = {Chia-Hung Dylan Tsai and Makoto Kaneko},
year = {2015},
doi = {10.1109/MHS.2015.7438310},
url = {http://dx.doi.org/10.1109/MHS.2015.7438310},
researchr = {https://researchr.org/publication/TsaiK15-1},
cites = {0},
citedby = {0},
pages = {1-3},
booktitle = {2015 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015, Nagoya, Japan, November 23-25, 2015},
publisher = {IEEE},
isbn = {978-1-4673-8217-5},
}