Chia-Hung Dylan Tsai, Makoto Kaneko. Frequency responses of on-chip pressure sensor with different deformation chambers. In 2015 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015, Nagoya, Japan, November 23-25, 2015. pages 1-3, IEEE, 2015. [doi]
Abstract is missing.