Electrothermally-Actuated Micromirrors with Bimorph Actuators - Bending-Type and Torsion-Type

Cheng-hua Tsai, Chun-Wei Tsai, Hsu-Tang Chang, Shih-Hsiang Liu, Jui-che Tsai. Electrothermally-Actuated Micromirrors with Bimorph Actuators - Bending-Type and Torsion-Type. Sensors, 15(6):14745-14756, 2015. [doi]

Authors

Cheng-hua Tsai

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Chun-Wei Tsai

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Hsu-Tang Chang

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Shih-Hsiang Liu

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Jui-che Tsai

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