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Cheng-hua Tsai, Chun-Wei Tsai, Hsu-Tang Chang, Shih-Hsiang Liu, Jui-che Tsai. Electrothermally-Actuated Micromirrors with Bimorph Actuators - Bending-Type and Torsion-Type. Sensors, 15(6):14745-14756, 2015. [doi]
Abstract is missing.