Electrothermally-Actuated Micromirrors with Bimorph Actuators - Bending-Type and Torsion-Type

Cheng-hua Tsai, Chun-Wei Tsai, Hsu-Tang Chang, Shih-Hsiang Liu, Jui-che Tsai. Electrothermally-Actuated Micromirrors with Bimorph Actuators - Bending-Type and Torsion-Type. Sensors, 15(6):14745-14756, 2015. [doi]

@article{TsaiTCLT15,
  title = {Electrothermally-Actuated Micromirrors with Bimorph Actuators - Bending-Type and Torsion-Type},
  author = {Cheng-hua Tsai and Chun-Wei Tsai and Hsu-Tang Chang and Shih-Hsiang Liu and Jui-che Tsai},
  year = {2015},
  doi = {10.3390/s150614745},
  url = {http://dx.doi.org/10.3390/s150614745},
  researchr = {https://researchr.org/publication/TsaiTCLT15},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {15},
  number = {6},
  pages = {14745-14756},
}