Hiroyuki Uchiyama, Takafumi Taniguchi. Plasma-Induced Fluorine Damage in P-HEMT Caused by C2F6/CHF3 RIE Plasma. IEICE Electronic Express, 1(2):46-50, 2004. [doi]
@article{UchiyamaT04,
title = {Plasma-Induced Fluorine Damage in P-HEMT Caused by C2F6/CHF3 RIE Plasma},
author = {Hiroyuki Uchiyama and Takafumi Taniguchi},
year = {2004},
url = {http://joi.jlc.jst.go.jp/JST.JSTAGE/elex/1.46},
researchr = {https://researchr.org/publication/UchiyamaT04},
cites = {0},
citedby = {0},
journal = {IEICE Electronic Express},
volume = {1},
number = {2},
pages = {46-50},
}