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Hiroyuki Uchiyama, Takafumi Taniguchi. Plasma-Induced Fluorine Damage in P-HEMT Caused by C2F6/CHF3 RIE Plasma. IEICE Electronic Express, 1(2):46-50, 2004. [doi]
Possibly Related PublicationsThe following publications are possibly variants of this publication: Reduction of plasma-induced fluorine damage to P-HEMTs using x-ray emissionHiroyuki Uchiyama, Takafumi Taniguchi, Takeshi Kikawa. ieiceee, 2(5):143-148, 2005. [doi] Suppression of plasma-induced fluorine damage in P-HEMTs using strained InSb barrierHiroyuki Uchiyama, Takafumi Taniguchi, Makoto Kudo. ieiceee, 1(16):513-517, 2004. [doi]
The following publications are possibly variants of this publication: