Fabrication of Miniaturized Capacitive Pressure Sensor using Thin Film Metallic Glass

S. Uejima, Chiemi Oka, Seiichi Hata, Junpei Sakurai. Fabrication of Miniaturized Capacitive Pressure Sensor using Thin Film Metallic Glass. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2018, Nagoya, Japan, December 9-12, 2018. pages 1-5, IEEE, 2018. [doi]

References

No references recorded for this publication.

Cited by

No citations of this publication recorded.