Thermal-Neutron SER Mitigation by Cobalt-Contact in 7 nm Bulk-FinFET Technology

Taiki Uemura, Byungjin Chung, Jegon Kim, Hyewon Shim, Shin-Young Chung, Brandon Lee, Jaehee Choi, Shota Ohnishi, Ken Machida. Thermal-Neutron SER Mitigation by Cobalt-Contact in 7 nm Bulk-FinFET Technology. In IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, TX, USA, March 27-31, 2022. pages 7, IEEE, 2022. [doi]

Authors

Taiki Uemura

This author has not been identified. Look up 'Taiki Uemura' in Google

Byungjin Chung

This author has not been identified. Look up 'Byungjin Chung' in Google

Jegon Kim

This author has not been identified. Look up 'Jegon Kim' in Google

Hyewon Shim

This author has not been identified. Look up 'Hyewon Shim' in Google

Shin-Young Chung

This author has not been identified. Look up 'Shin-Young Chung' in Google

Brandon Lee

This author has not been identified. Look up 'Brandon Lee' in Google

Jaehee Choi

This author has not been identified. Look up 'Jaehee Choi' in Google

Shota Ohnishi

This author has not been identified. Look up 'Shota Ohnishi' in Google

Ken Machida

This author has not been identified. Look up 'Ken Machida' in Google