Thermal-Neutron SER Mitigation by Cobalt-Contact in 7 nm Bulk-FinFET Technology

Taiki Uemura, Byungjin Chung, Jegon Kim, Hyewon Shim, Shin-Young Chung, Brandon Lee, Jaehee Choi, Shota Ohnishi, Ken Machida. Thermal-Neutron SER Mitigation by Cobalt-Contact in 7 nm Bulk-FinFET Technology. In IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, TX, USA, March 27-31, 2022. pages 7, IEEE, 2022. [doi]

@inproceedings{UemuraCKSCLCOM22,
  title = {Thermal-Neutron SER Mitigation by Cobalt-Contact in 7 nm Bulk-FinFET Technology},
  author = {Taiki Uemura and Byungjin Chung and Jegon Kim and Hyewon Shim and Shin-Young Chung and Brandon Lee and Jaehee Choi and Shota Ohnishi and Ken Machida},
  year = {2022},
  doi = {10.1109/IRPS48227.2022.9764581},
  url = {https://doi.org/10.1109/IRPS48227.2022.9764581},
  researchr = {https://researchr.org/publication/UemuraCKSCLCOM22},
  cites = {0},
  citedby = {0},
  pages = {7},
  booktitle = {IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, TX, USA, March 27-31, 2022},
  publisher = {IEEE},
  isbn = {978-1-6654-7950-9},
}