Masanori Usui, Takahide Sugiyama, Masayasu Ishiko, Jun Morimoto, Hirokazu Saitoh, Masaki Ajioka. Characterization of Trench MOS Gate Structures Utilizing Photon Emission Microscopy. Microelectronics Reliability, 42(9-11):1647-1652, 2002. [doi]
Abstract is missing.