Identification of macroscopic process observables for thin-film growth

Amit Varshney, Antonios Armaou. Identification of macroscopic process observables for thin-film growth. In 45th IEEE Conference on Decision and Control, CDC 2006, San Diego, CA, USA, 13-15 December, 2006. pages 2140-2146, IEEE, 2006. [doi]

Abstract

Abstract is missing.