Feedback control of surface roughness during thin-film growth using approximate low-order ODE model

Amit Varshney, Antonios Armaou. Feedback control of surface roughness during thin-film growth using approximate low-order ODE model. In 45th IEEE Conference on Decision and Control, CDC 2006, San Diego, CA, USA, 13-15 December, 2006. pages 3652-3659, IEEE, 2006. [doi]

Abstract

Abstract is missing.