Sara Vecchi, Vikram Bhosle, Andrea Palmieri, Davide Cornigli, Fabrizio Buscemi, Andrea Padovani, Deven Raj, Andrew Cockburn, Lucien Date, Gaurav Thareja, Federico Nardi, Luca Larcher. A Novel D2 Plasma Treatment for Defect Passivation: From Modeling to Process Optimization. In IEEE International Reliability Physics Symposium, IRPS 2025, Monterey, CA, USA, March 30 - April 3, 2025. pages 1-5, IEEE, 2025. [doi]
Abstract is missing.