Optimal actuator shape design with input and state constraints for a wafer heating application - researchr publication authors

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Daniel W. M. Veldman, Rob H. B. Fey, Hans J. Zwart, Marc M. J. van de Wal, J. D. B. J. van den Boom, Henk Nijmeijer. Optimal actuator shape design with input and state constraints for a wafer heating application. In 2019 American Control Conference, ACC 2019, Philadelphia, PA, USA, July 10-12, 2019. pages 3789-3794, IEEE, 2019. [doi]

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